DNA Origami-Mediated Substrate Nanopatterning of Inorganic Structures for Sensing Applications
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08:59 min
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September 27th, 2019
DOI :
September 27th, 2019
•Petteri Piskunen1, Boxuan Shen1, Sofia Julin1, Heini Ijäs1,2, J. Jussi Toppari3, Mauri A. Kostiainen1,4, Veikko Linko1,4
1Biohybrid Materials, Department of Bioproducts and Biosystems, Aalto University, 2University of Jyväskylä, Nanoscience Center, Department of Biological and Environmental Science, University of Jyväskylä, 3University of Jyväskylä, Nanoscience Center, Department of Physics, University of Jyväskylä, 4HYBER Center of Excellence, Department of Applied Physics, Aalto University
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Chapters in this video
0:04
Title
1:02
DNA Origami Assembly
1:34
Substrate Preparation
2:09
Amorphous Silicon (a-Si) Layer Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Oxygen Plasma Treatment
2:49
DNA Origami Deposition
3:44
Silicon Dioxide (SiO2) Mask Growth
4:38
Reactive Ion Etching (RIE)
5:25
Physical Vapor Deposition (PVD)
6:35
Hydrofluoric Acid (HF) Liftoff
7:05
Remaining a-Si RIE
7:38
Results: Representative Bowtie DNA Origami Imaging and Functional Analyses
8:15
Conclusion
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