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CiS Forschungsinstitut für Mikrosensorik GmbH

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Engineering

Using Laser Scanning Microscopy to Determine Electromigration in Molybdenum Disilicide
Julia Baldauf 1, Dennis Mitrenga 1, Andreas T. Winzer 1
1CiS Forschungsinstitut für Mikrosensorik GmbH

Here, we describe a workflow using laser scanning microscopy to determine the volume electromigrated through a metal line under test. By varying different experimental variables, a multitude of information about electromigration can be acquired. In this work, the length of the onset of electromigration is determined.

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